Cleanroom and Semiconductor

What is a cleanroom vacuum system?

A cleanroom or (or white room) is an environment, typically used in manufacturing, including of pharmaceutical products or scientific research, as well as aerospace semiconductor engineering applications with a low level of environmental pollutants such as dust, airborne microbes, aerosol particles, and chemical vapors.   Cleanrooms are also greatly used in the microelectronics and in the production of printed circuit boards, processors, etc.

Cleanrooms have a controlled level of contamination that is specified by the number of particles per cubic meter at a specified particle size. Tiger-Vac cleanroom vacuum systems are compatible with ISO Class 4 cleanroom environments as defined in ISO 14644-1.  This is equivalent to Class 10 cleanroom conditions previously defined in FED STD 209E.

To achieve this level of cleanliness, Tiger-Vac cleanroom vacuum systems are equipped with HEPA Filters (efficiency of 99.995% @ 0.3 micron. Tested: IEST-RP-CC001. H14 by MPPS method as per EN 1822) or ULPA Filters (efficiency of 99.999% @ 0.12 micron, or efficiency of 99.9995% @ 0.18 micron. Tested: IEST-RP-CC001. U15 by MPPS method as per EN 1822).  Our HEPA and ULPA filters are individually laser tested and the test results are written on each individual filter

In addition to using HEPA and ULPA filters that are individually tested, Tiger-Vac performs an aerosol leak test on each and every cleanroom vacuum that leaves our factory.  This ensures the integrity of the filter and the integrity of the seals and gaskets around the filter to guarantee cleanroom compatibility.  The aerosol leak test is a value-added service that Tiger-Vac provides.  We challenge other manufacturers to do the same.

Cleanroom vacuum cleaners have become an indispensable cleaning tool in a variety of clean and controlled environments.  Most cleanroom housekeeping protocols require vacuum cleaning to be performed on the floors, walls and around process machines.  Portable cleanroom vacuums have become very popular because of their convenience and ease of use. 

Contamination control specialists will often recommend the use of a portable vacuum system, even when a centralized “house vac” system is in place.  With the portable vacuum systems, the recovered material is contained in the vacuum canister and it is not spread throughout the piping system.  At the same time, the requirements for the portable vacuums systems are evolving and the requirements are becoming more stringent.

Portable cleanroom vacuum cleaners can also be used to clean the inside of the processing machines or in conjunction with processing equipment to remove internal dust or fumes generated during the manufacturing process;.   Centralized vacuum systems are not recommended for these applications because the tendency to have different productions and intermittent batches creates problems of dangerous mixtures in pipes and filters of centralized systems.  The costs tor cleaning the pipes of the centralized vacuum systems is very high and the results are not always guaranteed.  Also, with centralized vacuum systems it is very difficult to contain and dispose for the recovered material. 

The basic requirements for portable cleanroom vacuums have focussed on the filtration system and state that the vacuum system must meet the cleanroom standards for particle emissions.  A 4 or 5 stage filtration system is the norm.  The first stage of filtration is typically a disposable filter bag made of paper media or synthetic media.  The intermediate filters are typically fabricated from cloth or fabric and possibly have PTFE lamination to increase the filtration efficiency.  The final stage of filtration is an ULPA filter cartridge which is installed at the exhaust of the vacuum.  The exhaust ULPA filter captures the ultra-fine dust which has escaped the primary filters and it also captures the carbon residue from the vacuum system’s motor which is also a contaminant.

Tiger-Vac manufactures a variety of professional grade portable cleanroom vacuums specifically designed to recover waste liquid generated during the pharmaceutical manufacturing process.  The company also offers systems for the recovery of broken ampules glass ampoules or broken glass containers containing residues. There are also portable vacuum systems specifically designed to recover solvents and acids.

Tiger-Vac has been making cleanroom vacuum systems for over 25 years.  We have gained vast experience by visiting customers and by doing on-site product demonstrations.  The people who maintain the todays’ controlled environments know that they need a good vacuum system to help keep their cleanroom clean.  The issue faced by many cleanroom professionals today is: How do I keep my vacuum system clean?

Obviously, the best way to keep the vacuum system clean is through regular maintenance.  The vacuum system must be emptied frequently and the filters must be replaced regularly.  An aerosol leak test should be performed each time that the ULPA filter cartridge is removed or replaced.  However, the cleanliness standards are becoming more severe and simply replacing filters is often not enough. 

Tiger-Vac has introduced several new models which feature an autoclavable recovery tank, autoclavable wheel base assembly, autoclavable suction hose and autoclavable accessories.  Autoclaving is an effective method to remove dirt and grime from the various components of the vacuum system.  Proper autoclave treatment will inactivate all bacteria, viruses and bacterial spores.  

Tiger-Vac cleanroom vacuum systems are easy to disassemble and reassemble.  These new models feature recovery tanks are made of type 316 stainless and autoclavable nylon wheels.  Autoclavable suction hoses are available in EPDM or FDA compliant food-grade silicone which is clear and be easily inspected.  The vacuum tools are made of stainless steel, nitrile and food-grade silicone.